Ceramic product
Electrostatic chuck with compatibility, high-density, hight structural strength with customized
Electrostatic chuck has the function of normal use in vacuum atmosphere, and plays the role of holding and temperature control of wafer in high vacuum plasma or special gas environment, assisting semiconductor process equipment to realize the change of electrical characteristics and physical form...
Porous air floating platform with the load transfer technology of non-contact mode for semiconductor industry
With the development of gas lubrication technology, the air floating platform with its low friction, high cleanliness, long life, high motion accuracy characteristics are widely used in the need to offset gravity occasions and tests, but the air floating platform in the use of large noise, low be...
Microporous Ceramic Vacuum Chuck
Microporous ceramic vacuum chuck is also called nano microporous vacuum chuck, which means that a uniform solid or vacuum body is produced through a special nano powder manufacturing process, and a large number of connected or closed ceramic materials are generated inside the material through hig...
Ring groove chuck is widely used in semiconductor production equipment to absorb, fix, transfer and handle the silicon wafers, wafers and various workpieces and materials.
Ring groove chuck (groove chuck) is a commonly used industrial chuck in the semiconductor industry, with high temperature resistance, corrosion resistance, wear resistance and other characteristics. Usually made of silicon carbide or alumina ceramic materials. It is widely used in semiconducto...
Wafer pin chuck used for semiconductor exposure device and wafer inspection device
Wafer pin chuck (also call convex chuck), is industrial chuck commonly used in the semiconductor industry , with high temperature resistance, corrosion resistance, wear resistance and other characteristics. It is usually made of silicon carbide or alumina ceramic material with a raised point-like...
